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Nanoelectronics: the future of Electronics As transistor’s size becomes much smaller than micron, Microelectronics becomes Nanoelectronics (www.itrs.net/Common/2003ITRS/ExecSum2003.pdf ) 2 Challenges and Solutions • Challenge: preparation of a new generation of workers with solid skills in Nanoelectronics and Nanotechnology, overall • General approach to solution: acquiring the practical skills in Nanoelectronics through hands-on experience • Our specific solution: Interdisciplinary Nanoelectronics Laboratory for the Engineering/Science Undergraduate Curriculum 3 Scanning tunneling microscopy This novel technique yields surface topographies in real space and work function profiles on an atomic scale directly in real space. We know that the removal of an electron from the conduction band of a solid, requires a certain amount of energy called the affinity. For a metal or a doped semiconductor, when the conduction band is partially filled, the energy to remove an electron is lower and it is called the work function. Let us consider two conducting solids separated by a space. In terms of classical physics, a transfer process of an electron from one solid into another can be thought of as an electron transfer over a vacuum barrier. The process requires additional energy and because of this it has a small probability. According to quantum mechanics, a particle can penetrate in classically forbidden spatial region under a potential barrier. This phenomenon was called tunnelling. Thus, electron transfer between two solids can occur as a tunnelling process through (under) the vacuum barrier. 4 Different tunneling experiments have been performed, for example, by using two metal films separated by vacuum or a solid-state insulator (a sandwich structure). Each of the metal films can be considered as an electrode and when a voltage bias is applied to these electrodes a so-called tunneling electric current is produced. This current can give information on electronic properties, but obviously the information will be averaged over the area of the metal film surface. By appropriate shaping of one of the electrodes spatial resolution of far smaller scales than that of sandwich structures can be achieved. Since vacuum is conceptually a simple tunnel barrier, such experiments pertain directly to the properties of the electrodes and their bare surfaces. Clearly, vacuum tunneling offers fascinating and challenging possibilities to study surface physics and many other related areas. 5 The tunnel current, J , is a sensitive function of the gap between the tip and the surface, s, T i.e., 1/2 J V exp(-Aφ s) T T where φ is the average barrier height; the numerical value of A is equal to unity if φ is measured in eV and s in Å. The control unit, applies a DC voltage, V, to the z piezodrive, P , such that J remains constant when z T piezodevices P and P , move the tip over the x y P surface of the sample. At constant function φ, z V(x,y) yields the topography of the surface, that is V P z z x z(x,y), directly, as illustrated at a surface step in the figure. B δ Py A V C Δs Control T Fig. 1. The principles of Unit s IT operation of the Scanning Tunnelling Microscope. 6
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